https://www.nature.com/articles/s41598-022-19255-9
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Tuning of silicon nitride micro-cavities by controlled nanolayer deposition | Scientific Reports - Nature.com
9/5/22 at 12:58pm
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technology Science Tuning silicon nitride nanolayer deposition Scientific Reports - Nature.com Scientific Reports - Tuning
Scientific Reports - Tuning of silicon nitride micro-cavities by controlled nanolayer deposition
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