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Huawei patents EUV lithography tools used to make - TechSpot
12/25/22 at 6:51pm
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TechSpot
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Isaiah Mayersen
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Huawei has patented one component used in EUV lithography systems that is required to make high-end processors on sub-10 nm nodes. It solves the problem of interference...
Computers & Electronics
technology
lithography tools
EUV lithography systems
XUV
TechSpot
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https://www.techspot.com/news/97072-huawei-patents-euv-lithography-tools-used-make-10nm.html
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